Multi-Wafer Rotating MEMS Machines

Microtechnology and MEMS
Turbines, Generators, and Engines
 Buch
Sofort lieferbar
 
Describes how turbine generators, motor compressors, rocket motors and combustors have been used as energy sources at the MEMS scale
to PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.
The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
Editiert von: Jeffrey H. Lang
Inhaltsangabeto PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.
Autor: Jeffrey H. Lang
ISBN-13:: 9780387777467
ISBN: 0387777466
Erscheinungsjahr: 01.10.2009
Verlag: Springer-Verlag GmbH
Gewicht: 843g
Seiten: 454
Sprache: Englisch
Sonstiges: Buch, 244x164x33 mm